Experimental and Computational Analysis of Laser Melting of Thin Silicon Films

[+] Author and Article Information
C. P. Grigoropoulos, W. E. Dutcher, A. F. Emery

Department of Mechanical Engineering, University of Washington, Seattle, WA 98195

J. Heat Transfer 113(1), 21-29 (Feb 01, 1991) (9 pages) doi:10.1115/1.2910528 History: Received August 23, 1989; Revised April 04, 1990; Online May 23, 2008


Recrystallization of thin semiconductor films can yield improved electrical and crystalline properties. The recrystallization is often effected by using a laser source to melt the semiconductor that has been deposited on an amorphous insulating substrate. This paper describes detailed experimental observations of the associated phase-change process. A computational conductive heat transfer model is presented. The numerical predictions are compared to the experimental results and good agreement is obtained.

Copyright © 1991 by The American Society of Mechanical Engineers
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