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RESEARCH PAPERS: Featured Section—Heat Transfer in Manufacturing

TECHNICAL NOTE: Weakly Ionized Plasma Arc Heat Transfer Between Geometrically Dissimilar Electrodes

[+] Author and Article Information
S. S. Sripada, P. S. Ayyaswamy, I. M. Cohen

Department of Mechanical Engineering and Applied Mechanics, University Pennsylvania, Philadelphia, PA 19104-6315

J. Heat Transfer 120(4), 939-942 (Nov 01, 1998) (4 pages) doi:10.1115/1.2825913 History: Received September 30, 1997; Revised September 15, 1998; Online December 05, 2007

Abstract

A set of self-consistent conservation equations for the charged particle densities and the temperatures in a weakly ionized plasma between two dissimilar electrodes is numerically solved using an orthogonal body-fitted coordinate system. The electron number density and temperature variation in the discharge gap, and the results for the heat transfer to the anode are presented. Results have been developed for a configuration that commonly arises in microelectronic manufacturing—a thin cylindrical anode together with a planar cathode.

Copyright © 1998 by The American Society of Mechanical Engineers
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