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TECHNICAL PAPERS: Microscale Heat Transfer

Two-Dimensional Transient Analysis of Absorbing Thin Films in Laser Treatments

[+] Author and Article Information
N. Bianco

Dipartimento di Energetica, Termofluidodinamica Applicata E Condizionamenti ambientali, Universita degli Studi di Napoli Federico II, P. le Tecchio 80, Napoli 80125, Italye-mail: nibianco@unina.it

O. Manca

Dipartimento di Ingegneria Aerospaziale, Seconda Universita degli Studi di Napoli, Real Casa Dell’ Annunziata, via Roma 29, Aversa (CE) 81031, Italy e-mail: manca@unina.it

J. Heat Transfer 122(1), 113-117 (Jul 22, 1999) (5 pages) doi:10.1115/1.521429 History: Received January 06, 1999; Revised July 22, 1999
Copyright © 2000 by ASME
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References

Grigoropoulos, C. P., 1994, “Heat Transfer in Laser Processing of Thin Films,” Annual Review of Heat Transfer, C. L. Tien, ed., CRC, Boca Raton, FL, Vol. 5, Chap. 2, pp. 77–130.
Chen,  G., and Tien,  C. L., 1994, “Thermally Induced Optical Nonlinearity During Transient Heating of Thin Films,” ASME J. Heat Transfer, 116, pp. 311–316.
Tamura,  H., Miyao,  M., and Tokuyama,  T., 1979, “Laser-Annealing Behavior of a Phosphorus-Implanted Silicon Substrate Covered with a SiO2 Film,” J. Appl. Phys., 50, pp. 3783–3784.
Colinge,  J. P., and Van de Viele,  F., 1981, “Laser Light Absorption in Multilayers,” J. Appl. Phys., 52, pp. 4769–4771.
Park,  H. K., Xu,  X., Grigoropoulos,  C. P., Do,  N., Klees,  L., Leung,  P. T., and Tam,  A. C., 1993, “Transient Optical Transmission Measurement in Excimer-Laser Irradiation of Amorphous Silicon Films,” ASME J. Heat Transfer, 115, pp. 178–183.
Grigoropoulos,  C. P., Park,  H. K., and Xu,  X., 1993, “Modeling of Pulsed Laser Irradiation of Thin Silicon Layers,” Int. J. Heat Mass Transf., 36, pp. 919–924.
Mansuripur,  M., Connell,  G. A. N., and Goodman,  J. W., 1982, “Laser-Induced Local Heating of Multilayers,” Appl. Opt., 21, pp. 1106–1114.
Nakano,  S., , 1986, “Laser Patterning Method for Integrated Type a–Si Solar Cell Submodules,” Jpn. J. Appl. Phys., Part 1, 25, pp. 1936–1943.
Madison,  M. R., and McDaniel,  T. W., 1989, “Temperature Distributions Produced in an N-Layer Film Structure by Static or Scanning Laser or Electron Beam With Application to Magneto-Optical Media,” J. Appl. Phys., 66, pp. 5738–5748.
McGahan,  W. A., and Cole,  K. D., 1992, “Solutions of Heat Conduction Equation in Multilayers for Photothermal Deflection Experiments,” J. Appl. Phys., 72, pp. 1362–1373.
Cole,  K. D., and McGahan,  W. A., 1993, “Theory of Multilayers Heated by Laser Absorption,” ASME J. Heat Transfer, 115, pp. 767–771.
Knittl, Z., 1976, Optics of Thin Films, John Wiley and Sons, London, UK.
Ong,  C. K., Tan,  H. S., and Sin,  E. H., 1986, “Calculation of Melting Threshold Energies of Crystalline and Amorphous Materials due to Pulsed-Laser Irradiation,” Mater. Sci. Eng., 79, pp. 79–85.
Kiyama,  S., Hirono,  Y., Hosokawa,  H., Moriguchi,  T., Nakano,  S., and Osumi,  M., 1990, “Temperature Distribution Analysis in Multi-Layer Thin Film Structures by Laser Beam Irradiation,” Jpn. Soc. Precision Eng., 56, pp. 1500–1506.
Do,  N., Klees,  L., Leung,  P. T., Tong,  F., Leung,  W. P., and Tam,  A. C., 1992, “Temperature Dependence of Optical Constants for Amorphous Silicon,” Appl. Phys. Lett., 60, pp. 2186–2188.
Angelucci,  N., Bianco,  N., and Manca,  O., 1997, “Thermal Transient Analysis of Thin Film Multilayers Heated by Pulsed Laser,” Int. J. Heat Mass Transf., 40, pp. 4487–4491.

Figures

Grahic Jump Location
Isotherms for the c–Si/glass structure illuminated with a Gaussian source at different times (t=6 and 30 ns)
Grahic Jump Location
Isotherms for the a–Si/glass structure illuminated with a donut source at different times (t=6 and 30 ns)
Grahic Jump Location
Isotherms for the a–Si/glass structure illuminated with a Gaussian source at different times (t=6 and 30 ns)
Grahic Jump Location
Temperature profiles versus z (a) and t (b) in the c–Si/glass structure illuminated with a Gaussian source, for the one-dimensional (1-D) and two-dimensional (2-D) models
Grahic Jump Location
Temperature profiles versus z (a) and t (b) in the a–Si/glass structure illuminated with a Gaussian source, for the one-dimensional (1-D) and two-dimensional (2-D) models
Grahic Jump Location
Sketch of the structure

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