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TECHNICAL PAPERS: Heat Transfer in Manufacturing

Thermal Conductivity Measurement of CVD Diamond Films Using a Modified Thermal Comparator Method

[+] Author and Article Information
K. R. Cheruparambil, B. Farouk

Department of Mechanical Engineering and Mechanics, Drexel University, 3141 Chestnut Street, Philadelphia, PA 19104

J. E. Yehoda

Diamonex Inc., Allentown, PA 18105

N. A. Macken

Department of Engineering, Swarthmore College, Swarthmore, PA 19081-1397

J. Heat Transfer 122(4), 808-816 (May 09, 2000) (9 pages) doi:10.1115/1.1318206 History: Received August 16, 1999; Revised May 09, 2000
Copyright © 2000 by ASME
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References

Graebner,  J. E., Reiss,  M. E., and Seibles,  L., 1994, “Phonon Scattering in Chemical-Vapor Deposited Diamond,” Phys. Rev. B, 50, pp. 3702–3713.
Holman, J. P., 1984, Experimental Methods for Engineers, 4th Ed., McGraw-Hill, New York.
Sanders,  D. J., and Forsyth,  R. C., 1983, “Measurement of Thermal Conductivity and Contact Resistance of Paper and Thin-Film Materials,” Rev. Sci. Instrum., 54, pp. 238–244.
Powell, R. W., 1969, “Measurement Conductivity Determinations by the Thermal Comparator Methods,” R. P. Tye, Ed., Thermal Conductivity, Vol. 2, Academic Press, San Diego, pp. 275–338.
Lambropoulos,  J. C., Jolly,  M. R., Amsden,  C. A., Gilman,  S. E., Sinicropi,  M. J., Diakomihalis,  D., and Jacobs,  S. D., 1989, “Thermal Conductivity of Dielectric Thin Films,” J. Appl. Phys., 66, No. 9, pp. 4230–4242.
Mesyngier, C., Farouk, B., Lee, Y. H., Yi, G. W., and Brown, D. W., 1998, “Thermal Conductivity of DLC (Diamond-like Carbon) Thin Films and its Relation to Mechanical and Chemical Properties,” Proceedings of Thermal Conductivity 24, Technomic, Lancaster, PA, pp. 538–548.
Kittel, C., 1996, Introduction to Solid-State Physics, 7th Ed., John Wiley and Sons, New York.
Graebner, J. E, 1996, “Measurements of Specific Heat and Mass Density in CVD Diamond,” Diamond and Related Materials, 5 , pp. 1366–1370.
Anthony,  T. R., Banholzer,  W. F., Fleischer,  J. F., Wei,  L., Kuo,  P. K., Thomas,  R. L., and Pryor,  R. W., 1990, “Thermal Diffusivity of Isotropically Enriched 12C Diamond,” Phys. Rev. B, 42, pp. 1104–1111.
Graebner,  J. E., Jin,  S., Kammlott,  G. W., Herb,  J. A., and Gardinier,  C. F., 1992, “Large Anisotropic Thermal Conductivity in Synthetic Diamond Films,” Nature (London), 359, pp. 401–403.
Feldman, A., Frederiske, P. R., and Ying, X. T., 1989, “Thermal Wave Measurements of the Thermal Properties of CVD Diamond,” Diamond Optics II, SPIE, Vol. 1146, pp. 78–84.
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Incropera, P. F., and DeWitt, P. D., 1996, Fundamentals of Heat and Mass Transfer, 4th Ed., John Wiley and Sons, New York.

Figures

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Schematic of the classical thermal comparator
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Typical thermal comparator calibration curve
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Calibration curve using classical thermal comparator method
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Schematic of the modified thermal comparator for high conductivity samples
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Computational domain for the modified thermal comparator
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Grid structure at the probe/sample interface
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Numerically generated calibration curves with and without active cooling of the base plate
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Computed temperature fields in the probe/sample assembly
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Numerical calibration curve generated at two contact radii: 25.4 and 10 μm
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Computed contact radius variation as a function of load (within elastic limit)
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Measured probe output as a function of applied load for different samples
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Experimental calibration curve for the measurement of high thermal conductivity films

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