Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

[+] Author and Article Information
Jr-Hung Tsai

Mechanical Engineering Department, University of Michigan, Ann Arbor, MIe-mail: jhtsai@argon.eecs.berkeley.edu

Liwei Lin

Mechanical Engineering Department, University of California at Berkeley, Mechanical Engineering, 1113 Etcheverry Hall, University of California, Berkeley, CA 94720-1740

J. Heat Transfer 124(2), 375-382 (Oct 18, 2001) (8 pages) doi:10.1115/1.1445136 History: Received April 26, 2001; Revised October 18, 2001
Copyright © 2002 by ASME
Your Session has timed out. Please sign back in to continue.


Cotter, T. P., 1984, “Principles and Prospects of Micro heat Pipes,” Proc. 5th Int’l. Heat Pipe Conf., Tsukuba, Japan, pp. 328–335.
Bar-Cohen,  A., 1983, “Thermal Design of Immersion Cooling Modules for Electronic Components,” Heat Transfer Eng., 4, No. 3-4, pp. 35–50.
Niellsen,  N. J., 1985, “History of Thinkjet Printerhead Development,” HP Journal, 36, No. 5, pp. 4–10.
Lin,  L. and Pisano,  A. P., 1994, “Thermal Bubble Powered Microactuators,” Microsystem Technol., 1, pp. 51–58.
Lin,  L. and Pisano,  A. P., 1998, “Thermal Bubble Formation on Polysilicon Micro Resisters,” ASME Journal of Heat Transfer, 120, No. 3, pp. 735–742.
Yuan,  H., Oguz,  H. N., Prosperetti,  A., 1999, “Growth and Collapse of a Vapor Bubble in a Small Tube,” Int. J. Heat Mass Transf., 42, pp. 3643–3657.
Tsai, J. H., and Lin, L., 2001, “A Thermal Bubble Actuated Micro Nozzle-Diffuser Pump,” IEEE 2001 Micro Electro Mechanical System Workshop, Interlaken, Switzerland, pp. 409–412.
Evans, J. D., and Liepmann, D., 1999, “The Bubble Spring and Channel (BSAC) Valve: An Actuated, Bi-stable Mechanical Valve for In-Plane Fluid Control,” Transducer’99, Sendai, Japan, pp. 1122–1125.
Lin,  L., Udell,  K. S., and Pisano,  A. P., 1994, “Liquid-Vapor Phase Transition and Bubble Formation in Micro Structures,” Therm. Sci. Eng., 2 pp, 52–59.
Yang,  W. J., and Tsutsui,  K., 2000, “Overview of Boiling on Microstructures- Macro Bubbles From Micro Heaters,” Microscale Thermophys. Eng., 4, No. 1, pp. 7–24.
Cole, R. 1974, “Boiling Nucleation,” in Advances in Heat Transfer, Vol. 10, Academic, New York.
Hsu,  Y. Y., 1962, “On the size Range of Active Nucleation Cavities on a Heating Surface,” ASME Journal of Heat Transfer, 84C, pp. 207–216.
Sernas,  V. and Hooper,  F. C., 1969, “The Initial Vapor Bubble Growth on a Heated Wall during Nucleation Boiling,” Int. J. Heat Mass Transf., 12, pp. 1627–1639.
Moore,  F. D. and Mesler,  R. B., 1961, “The Measurement of Rapid Surface Temperature Fluctuations During Nucleate Boiling of Water,” AIChE J., 7, No. 4, pp. 620–624.
Koester, D., Mhedevan, R., and Marcus, K., 1999, Multi-User MEMS Processes (MUMPS) Design Handbook, rev. 4, May 1999, Cronos Integrated Microsystems, 3021 Cornwallis Road, Research Triangle Park, NC, 27709.
Mastrangelo, C. H., 1991, Ph.D. thesis, University of California at Berkeley, Berkeley, CA.
Lin, L., 1993, Ph.D. thesis, University of California at Berkeley, Berkeley, CA.
Carslaw, H. S., and Jaeger, J. C., 1959, Conduction of Heat in Solids, 2nd ed., Oxford University Press, London, pp. 99–100.
Vargaftik, N. B., 1975, Tables on the Thermophysical Properties of Liquids and Gases, Hemisphere Pub. Corp., Bristol, PA, pp. 418–420.
Stralen, S. V., and Cole, R., 1979, Boiling Phenomena, Vol. 1, Hemisphere Pub. Crop., Bristol, PA, pp. 454–456.
Goldstein,  R. J., Volino,  R. J., 1995, “Onset and Development of Natural Convection Above a Suddenly Heated Horizontal Surface,” ASME Journal of Heat Transfer, , 117, No. 4, pp. 808–821.
Shimokubo, T., Takagi, S., and Inoue, T., 1998, “Boiling Bubble Behavior form the Micro Heater,” Proc. 35th Heat Transfer Symp. of Japan, pp. 173–174.


Grahic Jump Location
Schematic drawing of the micro boiling experiment
Grahic Jump Location
Schematic diagrams of the polysilicon micro resister: (a) cross-sectional view; (b) top view; and (c) photograph of a fabricated polysilicon micro resister.
Grahic Jump Location
Schematic drawing of the lumped heat transfer model. The electric analogy is drawn on the right.
Grahic Jump Location
Measured wall temperature with respect to time on the polysilicon micro resister of 10 μm wide
Grahic Jump Location
Relative temperature changes for the transient micro bubble formation on the 10 μm wide polysilicon micro resister
Grahic Jump Location
Comparison of bubble nucleation in macro and micro scales: (a) typical wall temperature history in macro scale boiling experiments; and (b) typical wall temperature history in micro scale boiling on a polysilicon micro resister.
Grahic Jump Location
Simulated initial temperatures of the 10 μm wide micro resister by using various F values as compared with experimental measurements
Grahic Jump Location
Simulated results of temperature on polysilicon micro resister of 10 μm wide and silicon substrate versus time under an input current of 28 mA
Grahic Jump Location
Comparison of experimental and simulated wall temperatures before the nucleation of a micro-bubble. The equivalent heat transfer coefficient is found to be 105 W/m2°C
Grahic Jump Location
Bubble size growth rate on a 5 μm micro resister compared with the heat diffusion controlled bubble growth mode
Grahic Jump Location
Schematic drawing of the heat transfer mechanism in bubble growth model
Grahic Jump Location
Comparison between experimental data and simulation on a 10 μm wide of micro-resister under constant electrical current input. The constant of the bubble size growth rate is 50 μm/sec1/2 in each current level.




Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In