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TECHNICAL NOTES

Nanosecond Laser Repair of Adhered MEMS Structures

[+] Author and Article Information
James W. Rogers

Leslie M. Phinney

Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801

J. Heat Transfer 124(2), 394-396 (Aug 06, 2001) (3 pages) doi:10.1115/1.1447936 History: Received December 18, 2000; Revised August 06, 2001
Copyright © 2002 by ASME
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References

Maboudian,  R., and Howe,  R. T., 1997, “Critical Review: Adhesion in Surface Micromechanical Structures,” J. Vac. Sci. Technol. B, 15, pp. 1–20.
Fushinobu,  K., Phinney,  L. M., and Tien,  N. C., 1996, “Ultrashort-Pulse Laser Heating of Silicon to Reduce Microstructure Adhesion,” Int. J. Heat Mass Transf., 39, pp. 3181–3186.
Tien,  N. C., Jeong,  S., Phinney,  L. M., Fushinobu,  K., and Bokor,  J., 1996, “Surface Adhesion Reduction in Silicon Microstructures Using Femtosecond Laser Pulses,” Appl. Phys. Lett., 68, pp. 197–199.
Phinney, L. M., and Tien, C. L., 1998, “Recovery Mechanisms for Stiction-Failed Microcantilevers Using Short-Pulse Lasers,” Heat Transfer 1998: Proceedings of the 11th International Heat Transfer Conference, Vol. 5, pp. 145–150.
Fushinobu,  K., Phinney,  L. M., Kurosaki,  Y., and Tien,  C. L., 1999, “Optimization of Laser Parameters for Ultrashort-Pulse Laser Recovery of Stiction-Failed Microstructures,” Numer. Heat Transfer, Part A, A36, pp. 345–357.
Phinney,  L. M., Fushinobu,  K., and Tien,  C. L., 2000, “Subpicosecond Laser Processing of Polycrystalline Silicon Microstructures,” Microscale Thermophys. Eng., 4, pp. 61–75.
Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K. W., 2001, “MUMPs Design Handbook,” Cronos Integrated Microsystems, Research Triangle Park, NC, pp. 1–41.
de Boer, M. P., Clews, P. J., Smith, B. K., and Michalske, T. A., 1998, “Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients,” Proceeding of the 1998 Spring Materials Research Society Symposium, 518 , pp. 131–6.
Rogers,  J. W., and Phinney,  L. M., 2001, “Process Yields for Laser Repair of Aged, Stiction-Failed, MEMS Devices,” J. Microelectromech. Syst., 10, pp. 280–285.
Rogers, J. W., Mackin, T. J., and Phinney, L. M., 2001, “A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers,” Proceedings of the 2001 ASME International Mechanical Engineering Congress and Exposition, 2 , MEMS-23823, ASME, New York.
Jones,  R. E., and Wesolowski,  S. P., 1984, “Electrical, Thermoelectric, and Optical Properties of Strongly Degenerate Polycrystalline Silicon Films,” J. Appl. Phys., 56, pp. 1701–1706.
Globus, T., Fonash, S. J., and Gildenblat, G., 1996, “Optical Characterization of Hydrogenated Silicon Films in the Extended Energy Range,” in Diagnostic Techniques for Semiconductor Materials Processing II, Pang et al., eds., pp. 313–318.

Figures

Grahic Jump Location
Fluence variation for repair of stiction-failed microcantilevers
Grahic Jump Location
Exposure time variation for repair of stiction-failed microcantilevers

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