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TECHNICAL NOTES

Nanosecond Laser Repair of Adhered MEMS Structures

[+] Author and Article Information
James W. Rogers

Leslie M. Phinney

Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801

J. Heat Transfer 124(2), 394-396 (Aug 06, 2001) (3 pages) doi:10.1115/1.1447936 History: Received December 18, 2000; Revised August 06, 2001
Copyright © 2002 by ASME
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References

Figures

Grahic Jump Location
Fluence variation for repair of stiction-failed microcantilevers
Grahic Jump Location
Exposure time variation for repair of stiction-failed microcantilevers

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