TECHNICAL PAPERS: Heat Transfer in Manufacturing

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

[+] Author and Article Information
A. G. Mathews, J. E. Peterson

Department of Mechanical Engineering, University of Florida, Gainesville, FL 32611

J. Heat Transfer 124(3), 564-570 (May 10, 2002) (7 pages) doi:10.1115/1.1469525 History: Received March 28, 2001; Revised November 19, 2001; Online May 10, 2002
Copyright © 2002 by ASME
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Schematic of test section used to simulate an axisymmetric, impinging jet RTCVD reactor
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Schematic of flow visualization apparatus
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Schematic of laser induced Rayleigh light scattering optical components
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(a) Momentum dominated flow (Rei=30; GrH=0); (b) first instability (Rei=30; GrH≈3500); (c) stable buoyant flow (Rei=45; GrH≈31,000); (d) second instability (Rei=45; GrH≈30,000); and (e) momentum dominated, high temperature (Rei=30; GrH≈11,500)
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Flow transitions as a function of Grashof and dimensionless wafer temperature for Reynolds numbers from 15 to 60, H/Dw=0.2756 to 0.5513, and pressures of 0.02 ATM to 0.05 ATM. The shaded area at the bottom of each graph indicates stable momentum driven flow, and the striped area at the top is a region of stable, buoyancy dominated flow. The central white area flow conditions create either unstable flows, or in some cases apparently stable momentum dominated flow which subsequently becomes unstable. (a) Rei=15, H/Dw=0.3526; (b) Rei=30, H/Dw=0.2756 (gray symbols), H/Dw=0.3526 (black symbols); (c) Rei=45, H/Dw=0.3526; (d) Rei=60, H/Dw=0.3526; and (e) Rei=30, H/Dw=0.5513.
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Initial instability (all pressures included). The two lower length ratios approach the analytic solution for a cylinder heated from below 29. The highest length ratio appears significantly different.
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Stable flows at peak GrH for various Reynolds numbers. Triangles indicate conditions that led to first a stable buoyant flow followed by a high temperature momentum dominated flow.
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(a) Rayleigh light scattering measurements of temperature for pressure of 0.15 ATM, H/Dw=0.3526 and Rei=45. Symbols are the same as those used in Fig. 4; (b) Rayleigh light scattering measurements of temperature for pressure of 0.1 ATM, H/Dw=0.3526 and Rei=30. Symbols are the same as those used in Fig. 4.




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