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TECHNICAL PAPERS: Conduction

A Study of the Effect of Surface Metalization on Thermal Conductivity Measurements by the Transient Thermo-Reflectance Method

[+] Author and Article Information
Mihai G. Burzo, Pavel L. Komarov, Peter E. Raad

Department of Mechanical Engineering, Southern Methodist University, Dallas, TX 75275-0337

J. Heat Transfer 124(6), 1009-1018 (Dec 03, 2002) (10 pages) doi:10.1115/1.1517265 History: Received December 20, 2001; Revised July 24, 2002; Online December 03, 2002
Copyright © 2002 by ASME
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References

Figures

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Schematic of the heating and probing spot positioning on the sample
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Schematic of the experimental setup (http://www.engr.smu.edu/setsl)
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Uncertainty of the numerical simulation for a Si substrate covered by 1 μm layer of SiO2 and 1.5 μm layer of Au. Maximum relative errors at the different spatial step sizes ΔZ are shown in the brackets.
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Schematic of the absorption layer on the substrate
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Thermally Thick Layer: Temperature responses of a SiO2 bulk sample covered with Au, whose thickness is higher than the heat penetration depth, δH
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Thermally Thin Films: Temperature responses of a SiO2 bulk sample covered with Au, whose thickness is smaller than the heat penetration depth, δH
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Heat transfer regimes in gold covered SiO2 samples
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Thermally Thick Layer: Temperature responses of a Si bulk sample covered with Au, whose thickness is higher than the heat penetration depth, δH
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Thermally Thin Films: Temperature responses of a Si bulk sample covered with Au, whose thickness is smaller than the heat penetration depth, δH
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Heat transfer regimes in gold covered Si samples
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Thermally Thick Layer: Temperature responses of a diamond bulk sample covered with Au, whose thickness is higher than the heat penetration depth, δH
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Thermally Thin Films: Temperature responses of a diamond bulk sample covered with Au, whose thickness is smaller than the heat penetration depth, δH
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Heat transfer regimes in gold covered diamond samples
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Influence of the SiO2 thickness on the normalized temperature response of the gold covered (hAu=1.5 μm) samples
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Measured and computed temperature responses of a SiO2 layer covered by different thicknesses of gold
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Influence of thickness of Au absorption layer on the responsivity of thermal conductivity measurements for Si, SiO2 and diamond samples

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