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TECHNICAL PAPERS: Micro/Nanoscale Heat Transfer

Scanning Thermal Wave Microscopy (STWM)

[+] Author and Article Information
Ohmyoung Kwon, Li Shi, Arun Majumdar

Department of Mechanical Engineering, University of California, Berkeley, CA 94720

J. Heat Transfer 125(1), 156-163 (Jan 29, 2003) (8 pages) doi:10.1115/1.1518492 History: Received December 17, 2001; Revised July 03, 2002; Online January 29, 2003
Copyright © 2003 by ASME
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References

Figures

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Schematic diagram of the scanning thermal wave microscope
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(a) Schematic diagram of the test sample; (b) Measured thermal conductivity of Pyrex glass using the 3ω method (error bar shows ±3 percent range)
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Phase lag and deflection as a function of the probe height. The heating frequency is 3.2 kHz.
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Comparison between measured phase lag distributions and theoretical predictions as a function of position (symmetric scan). The offset added to the theoretically predicted value for each frequency is shown in the parentheses next to the heating frequency.
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Comparison between measured phase lag distributions and theoretical predictions as a function of position (asymmetric scan). The offset added to the theoretically predicted value for each frequency is shown in the parentheses next to the heating frequency.
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VLSI via structure: (a) top view (optical micrograph); (b) scanned area (optical micrograph); (c) schematic diagram of cross-section; (d) the structure under the scanning line (electron micrograph); (e) the cross-sectional shape of Metal 2 (electron micrograph); and (f ) the cross-sectional shape of Metal 1 (electron micrograph).
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Thermal wave imaging of a VLSI via structure: (a) Topography image; (b) phase lag image at 6.4 kHz; (c) amplitude image at 6.4 kHz.
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Phase lag distributions measured at three different wave generation modes for each frequency
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Geometry used in the simulation
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Phase lag distributions calculated for three different wave generation modes for each frequency
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The difference between minimum of phase lag with right heater operating and that with left heater operating at every wave frequency tested
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Phase lag contours on the cross section: (a) At 16 kHz; (b) at 100 kHz
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(a) Schematic diagram of two buried line heat sources; (b) Phase lag distribution on the surface with d/λ=h/d=1; (c) phase lag difference between above a heat source and in the center of two heat sources, ϕ(0)–ϕ(0.5)

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