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TECHNICAL PAPERS: Natural and Mixed Convection

Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam

[+] Author and Article Information
Yuwen Zhang

Department of Mechanical Engineering, New Mexico State University, Las Cruces, NM 88003

J. Heat Transfer 125(3), 429-437 (May 20, 2003) (9 pages) doi:10.1115/1.1565088 History: Received April 23, 2002; Revised November 15, 2002; Online May 20, 2003
Copyright © 2003 by ASME
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References

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Conde,  O., Kar,  A., and Mazumder,  J., 1992, “Laser Chemical Vapor Deposition of TiN Dot: A Comparison of Theoretical and Experimental Results,” J. Appl. Phys., 72, pp. 754–761.
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Figures

Grahic Jump Location
Physical model of laser chemical vapor deposition
Grahic Jump Location
Comparison between analytical and numerical solutions for pure conduction
Grahic Jump Location
Shape of the deposited film (P=300 W,ub=1.2 mm/s)
Grahic Jump Location
Comparison of cross section (P=300 W,ub=1.2 mm/s)
Grahic Jump Location
Contour of velocity component, w[m/s] (P=300 W,ub=1.2 mm/s): (a) z=0.0052 m; and (b) z=0.0081 m
Grahic Jump Location
Comparison of substrate surface temperature, Ts [K] (P=300 W,ub=1.2 mm/s): (a) with convection; and (b) without convection
Grahic Jump Location
Contour of temperature, T [K] (P=300 W,ub=1.2 mm/s,y=0): (a) with convection; and (b) without convection
Grahic Jump Location
Comparison of cross section (P=300 W,ub=1.6 mm/s)
Grahic Jump Location
Contour of velocity component, w [m/s] (P=300 W,ub=1.6 mm/s): (a) z=0.0052 m; and (b) z=0.0081 m
Grahic Jump Location
Contour of temperature, T [K] (P=300 W,ub=1.6 mm/s,y=0): (a) with convection; and (b) without convection
Grahic Jump Location
Comparison of cross section (P=360 W,ub=1.2 mm/s)
Grahic Jump Location
Contour of velocity component, w [m/s] (P=360 W,ub=1.2 mm/s): (a) z=0.0052 m; and (b) z=0.0081 m
Grahic Jump Location
Contour of temperature, T [K] (P=360 W,ub=1.2 mm/s,y=0): (a) with convection; and (b) without convection
Grahic Jump Location
Comparison of cross section (P=360 W,ub=1.6 mm/s)
Grahic Jump Location
Contour of velocity component, w [m/s] (P=360 W,ub=1.6 mm/s): (a) z=0.0052 m; and (b) z=0.0081 m
Grahic Jump Location
Contour of temperature, T [K] (P=360 W,ub=1.6 mm/s,y=0): (a) with convection; and (b) without convection

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