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TECHNICAL PAPERS: Bubbles, Particles, and Droplets

Bubble Nucleation on Micro Line Heaters

[+] Author and Article Information
Jung-Yeop Lee, Hong-Chul Park, Jung-Yeul Jung, Ho-Young Kwak

Mechanical Engineering Department, Chung-Ang University, Seoul 156-756, Korea

J. Heat Transfer 125(4), 687-692 (Jul 17, 2003) (6 pages) doi:10.1115/1.1571844 History: Received April 30, 2001; Revised February 20, 2003; Online July 17, 2003
Copyright © 2003 by ASME
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References

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Figures

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Steady state temperature distribution along the 5 μm-width line heater at the current of 18.34 mA
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Calculated (–) and experimental (•) I-R characteristics for the polysilicon heater of 50×5×0.523 μm3 in FC-72. The theoretical characteristics was obtained with ρ0=6.09×10−4 Ω-cm and ξ=0.80×10−3/°C.
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Steady state temperature distribution along the 3 μm-width line heater at the current of 13.45 mA
Grahic Jump Location
Calculated (–) and experimental (•) I-R characteristics for the polysilicon heater of 50×3×0.523 μm3 in FC-72. The theoretical characteristics was obtained with ρ0=5.90×10−4 Ω-cm and ξ=0.75×10−3/°C.
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Schematic of acryl chamber and tungsten probe tip contacting on driving pads
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Schematic (a) and enlarged (b) view of micro line heater
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Predicted nucleation temperature with contact angle for FC-72, FC-77, and FC-40 with the nucleation rate values of 1013,1012 and 1011/cm2 s respectively
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Bubble nucleation and growth when a finite current pulse of 200 μs is applied (a) and bubble nucleation and growth when longer duration of current is applied to the heater (b)

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