TECHNICAL PAPERS: Micro/Nanoscale Heat Transfer

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

[+] Author and Article Information
Tae Y. Choi

Institute of Energy Technology, Swiss Federal Institute of Technology Zurich, Zurich, CH-8092 Switzerlande-mail: choi@ltnt.iet.mavt.ethz.ch

Costas P. Grigoropoulos

Department of Mechanical Engineering, University of California, Berkeley, Berkeley, CA 94720-1740e-mail: cgrigoro@me.berkeley.edu

J. Heat Transfer 126(5), 723-726 (Nov 16, 2004) (4 pages) doi:10.1115/1.1795224 History: Received April 22, 2003; Revised February 27, 2004; Online November 16, 2004
Copyright © 2004 by ASME
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Grahic Jump Location
Temporal evolution of calculated surface electron density and reflectivity at λ=400 nm with no consideration of phase change. (Note the electron density at 0.5 ps is 2×1022 cm−3.) The laser fluence is 1.5 J/cm2. The critical density for lattice instability has been revealed theoretically at 1022 cm−3 (Ref. 5).
Grahic Jump Location
Schematic diagram of experimental setup (DM: dichroic mirror; NLC: nonlinear crystal; λ/4: quarter wave plate; L: lens; M: Mirror). The pump beam (solid line) and probe beam (dotted line) are normally incident on the sample.
Grahic Jump Location
Time-resolved surface images at fluence of 1.5 J/cm2. Highly reflecting phase is identified below 1 ps. The ablation starts at around 10 ps.
Grahic Jump Location
(a) Short time scale and (b) longer time scale time-resolved surface reflectivity traces. Reflectivity at the early stage approaches that of liquid silicon.
Grahic Jump Location
Reflectivity as a function of layer thickness for liquid silicon and solid-state plasma. (The low plasma density, 2×1022 cm−3, is utilized for predicting the relectivity at 0.5 ps.)
Grahic Jump Location
Comparison of time-resolved image sequence (a) 2.9 and (b) 4.6 J/cm2. The bright spot at the center of the irradiated zone persists longer at higher laser fluence.
Grahic Jump Location
Surface images taken at 500 ps for different energy densities for (a) 0.4, (b) 1.5, (c) 2.9, and (d) 4.6 J/cm2. Peripheral dark rings at higher fluences correspond to rarefaction wave toward the sample surface.




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