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TECHNICAL PAPERS: Micro/Nanoscale Heat Transfer

Experimental Investigation of Gas Flow in Microchannels

[+] Author and Article Information
Stephen E. Turner

Naval Undersea Warfare Center, 1176 Howell St., Newport, RI 02841

Lok C. Lam, Mohammad Faghri

University of Rhode Island, Department of Mechanical Engineering, 203 Wales Hall, Kingston, RI 02881

Otto J. Gregory

University of Rhode Island, Department of Chemical Engineering, 210 Crawford Hall, Kingston, RI 02881

J. Heat Transfer 126(5), 753-763 (Nov 16, 2004) (11 pages) doi:10.1115/1.1797036 History: Received August 04, 2003; Revised June 08, 2004; Online November 16, 2004
Copyright © 2004 by ASME
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References

Figures

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Top view of microchannel with local pressure measurement
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Process steps to fabricate microchannels into a silicon wafer
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Schematic of anodic bonding apparatus
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Cross-section scans for microchannels: (a) 031; (b) 072; (c) 024; (d) 186; (e) 319; (f) 110g; (g) 110d; and (h) 110b
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Microchannel test stand (a) Pinlet>1 atm and (b) Pinlet<1 atm
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Test section manifold and instrumentation
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Axial pressure distribution for air flow through microchannel 031
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Axial pressure distribution for air flow through microchannel 319
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Local Knudsen number for air flow through microchannel 319
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Local friction factor for nitrogen flow through microchannel 319
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Average friction factor for nitrogen flow plotted against Reynolds number
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Average friction factor for helium flow plotted against Reynolds number
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Influence of rarefaction on the local friction factor
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Local Mach number for air flow through microchannel 319
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Effect of compressibility on local friction factor for air flow through microchannel 319
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Effect of surface roughness on H=50 μm microchannel
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Effect of surface roughness on H=10 μm microchannel
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Effect of surface roughness on H=5 μm microchannel
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Effect of surface roughness on rarefied flow
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Effect of surface roughness on compressible flow

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