Anisotropic Slope Distribution and Bidirectional Reflectance of a Rough Silicon Surface

[+] Author and Article Information
Q. Z. Zhu, Z. M. Zhang

The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332

J. Heat Transfer 126(6), 985-993 (Jan 26, 2005) (9 pages) doi:10.1115/1.1795244 History: Received January 27, 2004; Revised May 04, 2004; Online January 26, 2005
Copyright © 2004 by ASME
Your Session has timed out. Please sign back in to continue.



Grahic Jump Location
Illustration of the BRDF definition and the specular reflection from a microfacet. The z-axis is normal to the mean surface, n is the normal of the microfacet m, α is the angle between the z-axis and n , and ψ is local incidence angle. For specular reflection, n bisects the directions of incidence and reflection.
Grahic Jump Location
Topographic characteristics of the rough side of the silicon wafer: (a) 3D surface image; (b) height distribution
Grahic Jump Location
Nodal network and the slope distributions: (a) schematic of the nodal network; (b) 1D slope distributions, p1x); (c) 2D slope distribution, p(ζxy)
Grahic Jump Location
The experimental setup of the TAAS
Grahic Jump Location
Comparisons of the predicted and measured BRDFs at λ=635 nm: (a) p polarization; (b) s polarization
Grahic Jump Location
Effect of wavelength on BRDF: (a) p polarization, (b) s polarization
Grahic Jump Location
Comparison of BRDFs at azimuthal angle ϕi=0 deg
Grahic Jump Location
BRDFs at different azimuthal angles for p polarization: (a) predicted; (b) measured
Grahic Jump Location
BRDFs at different azimuthal angles for s polarization: (a) predicted; (b) measured




Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In