Anisotropic Slope Distribution and Bidirectional Reflectance of a Rough Silicon Surface

[+] Author and Article Information
Q. Z. Zhu, Z. M. Zhang

The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332

J. Heat Transfer 126(6), 985-993 (Jan 26, 2005) (9 pages) doi:10.1115/1.1795244 History: Received January 27, 2004; Revised May 04, 2004; Online January 26, 2005
Copyright © 2004 by ASME
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Illustration of the BRDF definition and the specular reflection from a microfacet. The z-axis is normal to the mean surface, n is the normal of the microfacet m, α is the angle between the z-axis and n , and ψ is local incidence angle. For specular reflection, n bisects the directions of incidence and reflection.
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Topographic characteristics of the rough side of the silicon wafer: (a) 3D surface image; (b) height distribution
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Nodal network and the slope distributions: (a) schematic of the nodal network; (b) 1D slope distributions, p1x); (c) 2D slope distribution, p(ζxy)
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The experimental setup of the TAAS
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Comparisons of the predicted and measured BRDFs at λ=635 nm: (a) p polarization; (b) s polarization
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Effect of wavelength on BRDF: (a) p polarization, (b) s polarization
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Comparison of BRDFs at azimuthal angle ϕi=0 deg
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BRDFs at different azimuthal angles for p polarization: (a) predicted; (b) measured
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BRDFs at different azimuthal angles for s polarization: (a) predicted; (b) measured




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