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Article

Coupled Field Analyses in MEMS With Finite Element Analysis

[+] Author and Article Information
Ravi Chandra Sikakollu, Lemmy Meekisho

Department of Mechanical Engineering, Portland State University, Portland, OR

Andres LaRosa

Physics Department, Portland State University, Portland, OR

J. Heat Transfer 127(1), 34-37 (Feb 15, 2005) (4 pages) doi:10.1115/1.1804204 History: Received April 13, 2004; Revised July 06, 2004; Online February 15, 2005
Copyright © 2005 by ASME
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References

Hsu, T. R., 2002, MEMS & Microsystems Designs and Manufacture, McGraw-Hill.
Rebeiz, G. M., 2003, RF MEMS: Theory, Design and Technology, John Wiley.
Madou, M., 2002, Fundamentals of Microfabrication, the Science of Miniaturization, CRC Press.
Hak, G. E., 2002, The MEMS Handbook, CRC Press.
Nguyen,  T. C. H., Tang,  W. C., and Howe,  R. T., 1989, “Laterally Driven Polysilicon Resonant Microstructures,” Sens. Actuators, A20, pp. 25–32.
Sentura, S. D., Mehregany, M., Nagarkar, P., and Lang, J. H., 1990, “Operation of Microfabricated Harmonic and Ordinary Side-Drive Motors,” Proc. IEEE MEMS, pp. 1–8.
Fujita, H., 1997, “A Decade of MEMS and its Future,” Micro Electro Mechanical Systems, MEMS ’97, Proceedings, IEEE, Tenth Annual International Workshop, pp. 1–7.
Que, L., Park, J. S., and Giachandani, Y. B., 1999, “Bent Beam Electro-Thermal Actuators for High Force Application,” Proc. MEMS ’99.

Figures

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Design of the thermal actuator
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Schematic of the thermal actuator before and after actuation
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Scaling of the cold arm of the actuator
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Temperature variation with voltage
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Tip displacement versus voltage
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Values of von Mises stresses versus voltage
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Tip temperature versus scale factor
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Tip displacement versus scale factor

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