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TECHNICAL PAPERS: Micro/Nanoscale Heat Transfer

Analytical and Experimental Investigation of Laser-Microsphere Interaction for Nanoscale Surface Modification

[+] Author and Article Information
Alex J. Heltzel, Senthil Theppakuttai, John R. Howell, Shaochen Chen

Department of Mechanical Engineering,  The University of Texas at Austin, Austin, TX 78712

J. Heat Transfer 127(11), 1231-1235 (Jun 20, 2005) (5 pages) doi:10.1115/1.2039110 History: Received December 01, 2004; Revised June 20, 2005

An analytical and experimental investigation on the features created on silicon by the irradiation of microspheres on the substrate surface with a pulsed laser is presented. Silica microspheres of 1.76μm diameter are deposited on the silicon substrate and are irradiated with a pulsed Nd:YAG laser of wavelength 532nm. An analytical model based on Mie theory is developed, which includes all evanescent terms and does not rely on either far-field or size-parameter approximations. The predicted intensity distributions on the substrate indicate a strong near-field enhancement confined to a very small area (nanometer scale). A multidimensional, numerical model was built to simulate the heat transfer through the silicon. An explicit scheme of the enthalpy method was employed to track the solid∕liquid phase boundary. The experiment was performed for various laser energies used in the modeling, and the features obtained are characterized using a scanning electron microscope. The experimental results correlate well with the predicted results.

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Copyright © 2005 by American Society of Mechanical Engineers
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Figures

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Figure 1

Intensity enhancement on silicon surface due to laser-microsphere interaction: λ=532nm, silica microsphere 1.76μm in diameter

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Figure 2

Intensity enhancement on silicon from 1.76μmSiO2 spheres and 532nm laser

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Figure 3

Intensity enhancement on silicon substrate from 1.76μm diameter silica particle elevated 1.76μm above surface, 532nm laser

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Figure 4

Laser irradiation of disperse silica spheres on silicon substrate: (a) Schematic of the experimental setup; (b) schematic of silica microspheres on silicon

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Figure 5

Predicted geometry of melt and mushy zones in silicon at laser fluence of (a) 50mJ∕cm2, (b) 100mJ∕cm2, (c) 200mJ∕cm2, and (d) 300mJ∕cm2

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Figure 6

SEM micrograph of 1.76μmSiO2 spheres irradiated by 532nm laser at a fluence of (a) 50mJ∕cm2, (b) 100mJ∕cm2, (c) 200mJ∕cm2, and (d) 300mJ∕cm2

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Figure 7

Comparison of the predicted and experimental feature diameters for 1.76μmSiO2 spheres irradiated by 532nm laser at different laser fluences

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