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RESEARCH PAPERS: Micro/Nanoscale Heat Transfer

3-Omega Measurements of Vertically Oriented Carbon Nanotubes on Silicon

[+] Author and Article Information
X. Jack Hu1

Mechanical Engineering Department,  Stanford Univeristy, 440 Escondido Mall, Stanford, CA 94305jack.hu@intel.com

Antonio A. Padilla

Mechanical Engineering Department,  Stanford Univeristy, 440 Escondido Mall, Stanford, CA 94305

Jun Xu, Timothy S. Fisher

School of Mechanical Engineering and Birck Nanotechnology Center,  Purdue University, 585 Purdue Mall, West Lafayette, IN 47907

Kenneth E. Goodson

Mechanical Engineering Department,  Stanford University, 440 Escondido Mall, Stanford, CA 94305

1

Current address: Intel Corporation, 5000 W Chandler Blvd, CH5-157, Chandler, AZ 85226.

J. Heat Transfer 128(11), 1109-1113 (Nov 04, 2005) (5 pages) doi:10.1115/1.2352778 History: Received February 24, 2005; Revised November 04, 2005

An exploratory thermal interface structure, made of vertically oriented carbon nanotubes directly grown on a silicon substrate, has been thermally characterized using a 3-omega method. The effective thermal conductivities of the carbon nanotubes (CNT) sample, including the effects of voids, are found to be 74WmK to 83WmK in the temperature range of 295K to 323K, one order higher than that of the best thermal greases or phase change materials. This result suggests that the vertically oriented CNTs potentially can be a promising next-generation thermal interface solution. However, fairly large thermal resistances were observed at the interfaces between the CNT samples and the experimental contact. Minimizing these contact resistances is critical for the application of these materials.

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Copyright © 2006 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

SEM images of the CNT sample

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Figure 2

Schematic of the experimental structure

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Figure 3

Electronic circuit of the experimental system (14)

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Figure 4

Equivalent thermal circuit for 1D heat conduction approximation

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Figure 5

Observed temperature oscillation amplitudes versus theoretic predictions at 300K (empty circles and squares are experimental data; solid lines are theoretic predictions)

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Figure 6

Measured effective thermal properties (solid lines are linear curve fits)

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Figure 7

Measured contact thermal resistance between the CNT sample and the experimental contact (solid lines are linear curve fits)

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