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Research Papers: Micro/Nanoscale Heat Transfer

# Infrared Radiative Properties of Submicron Metallic Slit Arrays

[+] Author and Article Information
Y.-B. Chen1

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332

B. J. Lee

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332

Z. M. Zhang2

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332zhuomin.zhang@me.gatech.edu

1

Current address: Department of Mechanical Engineering, National Cheng Kung University, Taiwan 701, Taiwan.

2

Corresponding author.

J. Heat Transfer 130(8), 082404 (Jun 04, 2008) (8 pages) doi:10.1115/1.2909614 History: Received May 29, 2007; Revised August 09, 2007; Published June 04, 2008

## Abstract

Submicron metallic slit arrays with different geometry were designed and fabricated on silicon substrates. Their infrared radiative properties (transmittance, reflectance, and absorptance) were investigated both experimentally and theoretically. The normal transmittance of three fabricated Au slit arrays was measured at wavelengths between $2μm$ and $15μm$ using a Fourier-transform infrared spectrometer. The experimental results were compared to the values calculated from the rigorous coupled-wave analysis. The applicability of the effective medium theory for modeling radiative properties was also examined. The agreement between the measurement and modeling results demonstrates the feasibility of quantitative tuning of the radiative properties by employing periodic micro/nanostructures.

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## Figures

Figure 1

Illustration of the fabrication process for periodic submicron metallic slit arrays (not to scale): (a) exposing e-beam, (b) developing the resist, (c) evaporating metals, and (d) stripping the resist

Figure 2

SEM images of two fabricated structures: (a) Sample 2 and (b) Sample 3

Figure 3

Schematic of the optical setup for measuring the polarized infrared transmittance

Figure 4

Measured normal transmittance spectra for a plain 400-μm-thick Si substrate

Figure 5

Transmittance of a submicrometer metallic slit array identified as Sample 1: (a) TE wave and (b) TM wave

Figure 9

Calculated reflectance and absorptance using the geometry of Sample 2 for radiation incident on the Si substrate: (a) reflectance and (b) absorptance

Figure 6

Comparison of the transmittance spectra between experiments and modeling results from both RCWA and EMT for Sample 2: (a) TE wave and (b) TM wave

Figure 8

Calculated reflectance and absorptance using the geometry of Sample 2 for radiation incident on the metallic slits: (a) reflectance and (b) absorptance. The solid and dashed lines indicated the results from EMT and RCWA, respectively. The lines with square marks are for TM waves.

Figure 7

Measured transmittance of Sample 3 and comparison with RCWA prediction considering all diffraction orders or only the zeroth order: (a) TE wave and (b) TM wave

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