Research Papers: Experimental Techniques

Thermal Contact Calibration Between a Thermocouple Probe and a Microhotplate

[+] Author and Article Information
L. Thiery

 FEMTO-ST (CNRS UMR 6174), 32 avenue de l’Observatoire, 25030 Besancon Cedex, Francelaurent.thiery@univ-fcomte.fr

S. Toullier, D. Teyssieux

 FEMTO-ST (CNRS UMR 6174), 32 avenue de l’Observatoire, 25030 Besancon Cedex, France

D. Briand

 Institute of Microtechnology, rue Jaquet-Droz 1, P.O. Box 526, CH-2002 Neuchâtel, Switzerland

J. Heat Transfer 130(9), 091601 (Jul 03, 2008) (7 pages) doi:10.1115/1.2943306 History: Received March 26, 2007; Revised November 13, 2007; Published July 03, 2008

Since local thermal probing has become a major tool for studying transport phenomena at micro- and nanoscale levels, the fundamental aspect of the interaction between the tip of the probe and the sample has remained the key point on which any quantitative measurement relies. In this paper, we present results on thermal resistances involved in the contact mechanism of a microthermocouple cantilever probe that is used to scan the surface of a microhotplate at different levels of temperature. We point out the potential of such an active microsystem as an efficient calibration tool for near-field thermal probes.

Copyright © 2008 by American Society of Mechanical Engineers
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Figure 1

Schematic cross section of the microhotplate

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Figure 2

Pt-PtRh (S type) thermocouple cantilever probe used for contact temperature measurements. Wire diameter: 1.3μm. Optical image of the cantilever and scanning electron microscope view of the junction tip.

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Figure 3

Schematic thermal configuration of the thermocouple junction on the hotplate membrane

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Figure 4

Principle of thermal contact resistance calibration

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Figure 5

Contact probe calibration procedure on a microhotplate. (a) initial thermal balance, (b) contact perturbation compensated to maintain Theater as unchanged, and (c) double contact allowing to measure the local temperature drop.

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Figure 6

Probe thermal contact parameter ϕ on platinum heated wire versus contact temperature.

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Figure 7

Temperature distribution of the thin (0.75μm) microhotplate membrane (1mm2) at 30mW (left) and 75mW (right)



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