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Research Papers: Micro/Nanoscale Heat Transfer

Measurement of the Thermal Conductivity and Heat Capacity of Freestanding Shape Memory Thin Films Using the 3ω Method

[+] Author and Article Information
Ankur Jain1

Department of Mechanical Engineering, Stanford University, Stanford, CA 94305ankurjain@stanfordalumni.org

Kenneth E. Goodson

Department of Mechanical Engineering, Stanford University, Stanford, CA 94305

1

Present address: Freescale Semiconductor, Austin, TX 78754.

J. Heat Transfer 130(10), 102402 (Aug 08, 2008) (7 pages) doi:10.1115/1.2945904 History: Received June 04, 2007; Revised January 11, 2008; Published August 08, 2008

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Copyright © 2008 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematic showing the geometry of the freestanding thin film suspended on a substrate

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Figure 2

A picture and SEM showing the silicon nitride freestanding thin-film microdevice

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Figure 3

An image of the freestanding NiTi thin film. Note the ridgy membrane surface due to the compressive residual stress in the film.

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Figure 4

A schematic of the experimental setup used for temperature-dependent thermophysical measurements on freestanding thin films

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Figure 5

Plot of the heater electrical resistance as a function of temperature. A linear temperature dependence is observed as expected.

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Figure 6

Heater temperature rise as a function of the input heating power. As expected, the temperature rise depends linearly on the heating power. There is a good agreement between the experimental data and the analytical model. Thermal conductivity of the freestanding thin film may be determined from the slope of the plot.

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Figure 7

2ω temperature oscillation amplitude as a function of the frequency of heating current. Experimental data agree well with the analytical model. Using the thermal conductivity value determined from the temperature rise data, least-squares fitting of experimental data with Eq. 9 yields the value of thermal diffusivity of the freestanding thin film.

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Figure 8

Temperature dependence of thermal conductivity and heat capacity for 1.5μm silicon nitride film

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Figure 9

Temperature dependence of thermal conductivity and heat capacity for 1.7μm NiTi film. Note that the phase transformation temperature of NiTi is around 0°C.

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