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Research Papers: Micro/Nanoscale Heat Transfer

Time-Resolved Micro-Raman Thermometry for Microsystems in Motion

[+] Author and Article Information
Justin R. Serrano, Sean P. Kearney

Engineering Sciences Center, Sandia National Laboratories, Albuquerque, NM 87185-0346

The SNR for shot-noise-limited detection is SNR=IRaman/IRaman+Ibackground, where I indicates peak intensity.

J. Heat Transfer 130(12), 122401 (Sep 16, 2008) (5 pages) doi:10.1115/1.2976552 History: Received August 13, 2007; Revised June 10, 2008; Published September 16, 2008

Micro-Raman thermometry has been demonstrated to be a feasible technique for obtaining surface temperatures with micron-scale spatial resolution for microelectronic and microelectromechanical systems (MEMSs). However, the intensity of the Raman signal emerging from the probed device is very low and imposes a requirement of prolonged data collection times in order to obtain reliable temperature information. This characteristic currently limits Raman thermometry to steady-state conditions and thereby prevents temperature measurements of transient and fast time-scale events. In this paper, we discuss the extension of the micro-Raman thermometry diagnostic technique to obtain transient temperature measurements on microelectromechanical devices with 100μs temporal resolution. Through the use of a phase-locked technique we are able to obtain temperature measurements on electrically powered MEMS actuators powered with a periodic signal. Furthermore, we demonstrate a way of obtaining reliable temperature measurements on micron-scale devices that undergo mechanical movement during the device operation.

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Copyright © 2008 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematics of (a) chevron-style electrothermal actuator and (b) optothermal actuator tested in this study

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Figure 2

Schematic of micro-Raman system

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Figure 3

(a) Image of probe-laser line obtained with cylindrical optics in Raman system with laser incident on leg of chevron-style actuator. (b) Probe-laser line incident on a flat surface to show full extent of probe-laser line. During the experiments, the laser is used as shown in (a).

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Figure 4

Timing diagram for phase-locked, time-resolved Raman thermometry

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Figure 5

Temperature profile of a standard electrothermal actuator operated at 3.9 V. The time axis has been shifted by 0.7 ms. The dashed line indicates the applied voltage signal (3.9 V, 100 Hz, and 30% duty cycle).

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Figure 6

Temperature of an electrically powered optothermal actuator operated at 3.66 V. The time axis has been shifted by 0.25 ms. The dashed line indicates the applied voltage signal (3.66 V, 100 Hz, and 50% duty cycle).

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Figure 7

Temporal evolution of the temperature on the leg of a standard electrothermal actuator operated at 6.0 V. The dotted and dashed lines indicate temperatures obtained from numerical simulations.

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