The 5th ASME Micro/Nanoscale Heat and Mass Transfer Conference (MNHMT 2016) was held in Singapore on Jan. 4–6, 2016. The Conference was organized by the School of Mechanical and Aerospace Engineering of Nanyang Technological University and sponsored by the ASME Heat Transfer Division, Xi'an Jiaotong University, Singapore Institute of Manufacturing Technology, Quantum Technology Group (Singapore) Pte. Ltd., and Nanjing Inout E-Business Co. Ltd. This conference series is dedicated to Dr. Chang-Lin Tien (1935–2002), a world renowned scholar and a leader in higher education, whose intellect and unique vision have continued to inspire our efforts in expanding the frontiers of micro/nanoscale heat and mass transfer. The previous four conferences were hosted by the National Cheng Kung University in Tainan (January 2008), Shanghai Jiao Tong University in Shanghai (December 2009), Georgia Institute of Technology in Atlanta (March 2012), and the University of Hong Kong in Hong Kong (December 2013).