Silicon is the primary material of integrated circuit (IC) manufacturing in microelectronic industry. It has high thermal conductivity and superior thermomechanical properties compatible to most semiconductors. These characteristics make it an ideal material for fabricating micro/mini heat pipes and their wick structures. In this article, silicon wick structures, composed of cylindrical pillars 320 μm in height and 30–100 μm in diameter, are developed for studies of phase change capability. Fabrication of the silicon wick structures utilizes the standard microelectromechanical systems (MEMS) approach, which allows the precise definition on the wick dimensions, as well as the heated wick area. On these bases, experimental characterizations of temperature variations versus input heat fluxes, associated with simultaneous visualization on the liquid transport and the dryout, are performed to investigate the wick dimensional effects on the maximum phase change capability. On the wick structure with the pillar diameter/pores of 100 μm and a heated wick area of 2 mm × 2 mm, the phase change reached a maximum heat flux of 1130 W/cm2. Despite of the liquid bottom-feed approach, interactions between liquid and vapor phases enables the heated wick structure absorb liquid from its surrounding wick area, including from its top side with a longer liquid transport path. In contrast, a wick structure with fine pillars (10 μm in diameter) inhibited the generation of nucleate boiling. Evaporation on the meniscus interface becomes the major phase change mechanism. A large heated wick area (4 mm × 4 mm) increases the viscous loss in transporting liquid to wet the entire wick, advancing the dryout at 135 W/cm2. Mass transfer analysis, as well as discussion of the experimental results, indicates that a dimensional ratio r/l (pillar diameter/characteristic length of the heated wick area) is a key parameter in determining the maximum phase change capability. A low r/l ratio enhances heat and mass transport capability, as well as heat transfer coefficient.