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  • Proceedings Article January 01, 2004

    Brent A. Nelson; Tanya L. Wright; William P. King; Paul E. Sheehan; Lloyd J. Whitman

    Proc. ASME. 41774; Design, Synthesis, and Applications:125-126.January 01, 2004
    NANO2004-46074
    doi: 10.1115/NANO2004-46074

    TOPICS: Nanolithography