This paper deals with the voltage-amplitude response (or voltage response) of superharmonic resonance of second order of MEMS resonator sensors under electrostatic actuation. The system consists of a MEMS flexible cantilever above a parallel ground plate. The AC frequency of actuation is near one fourth the natural frequency. The voltage response of the superharmonic resonance of second order of the structure is investigated using the Reduced Order Model (ROM) method. Effects of voltage and damping voltage response are reported.
Volume Subject Area:Flexible and Smart Structure Control
Topics:Microelectromechanical systems, Resonance, Cantilevers, Damping, Sensors
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