Design and Analysis of Electrostatically Actuated Mechanical Sensor for Graphene

Very little is known about the fracture behaviors of novel nanomaterials such as carbon nanotubes and graphene due to the difficulty of sample manipulation and in situ detection of their failure mechanism. In the present study, the design and analysis of a Microelectromechanical System (MEMs) device is presented for the tensile testing of single layer graphene. The electrostatically actuated dual parallel plate actuators in the proposed MEMS device enable in situ measurement in a scanning electron microscope by stretching the two ends of a nanostructured sample simultaneously. The elongation in the specimen is obtained by nonlinear finite element analysis using COMSOL, and MATLAB. For the validation of the proposed MEMS device, a lumped model of the system is utilized to analyze the stress-strain behavior of the nanostructured sample under the force generated by the electrodes.