The Heat Transfer Problem for the Modified Chemical Vapor Deposition Process

[+] Author and Article Information
M. Choi, H. R. Baum, R. Greif

University of California, Berkeley, Department of Mechanical Engineering, Berkeley, CA 94720

J. Heat Transfer 109(3), 642-646 (Aug 01, 1987) (5 pages) doi:10.1115/1.3248136 History: Received December 13, 1985; Online October 20, 2009


The heat transfer problem related to the modified chemical vapor deposition process has been analyzed in the high Peclet number limit. Variations in the axial, angular, and radial directions are presented. Of particular interest are the effects of tube rotation and variable properties on the temperature profiles.

Copyright © 1987 by ASME
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