Coupled Field Analyses in MEMS With Finite Element Analysis

[+] Author and Article Information
Ravi Chandra Sikakollu, Lemmy Meekisho

Department of Mechanical Engineering, Portland State University, Portland, OR

Andres LaRosa

Physics Department, Portland State University, Portland, OR

J. Heat Transfer 127(1), 34-37 (Feb 15, 2005) (4 pages) doi:10.1115/1.1804204 History: Received April 13, 2004; Revised July 06, 2004; Online February 15, 2005
Copyright © 2005 by ASME
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Schematic of the thermal actuator before and after actuation
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Scaling of the cold arm of the actuator
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Temperature variation with voltage
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Tip displacement versus voltage
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Values of von Mises stresses versus voltage
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Tip temperature versus scale factor
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Tip displacement versus scale factor
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Design of the thermal actuator



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