... 2011 01 02 2011 beams (structures) Galerkin method impact (mechanical) mechanical contact micromechanical devices nonlinear equations springs (mechanical) Stiction failures are now posing a significant challenge to the commercial deployment of RF (Radio Frequency) MEMS...

... Oscillators: Theory and Experiment ,” Phys. Rev. E 1063-651X , 74 , p. 046213 . 10.1103/PhysRevE.74.046213 09 02 2008 22 09 2009 19 02 2010 19 02 2010 bifurcation chaos electrostatic devices finite difference methods micromechanical devices oscillations self...

... micromechanical devices The field of microelectromechanical systems (MEMS) is the branch of microelectronic engineering dedicated to building micromachines on computer chips. It emerged with the increasing sophistication of microelectronic fabrication techniques over the last half of the 20th century (see...

... natural frequency micromechanical devices 31 03 2007 28 01 2008 30 04 2008 Substituting Eqs. 18 , 19 into 5a , 5b , and then integrating Eq. 5c along the ring by using Galerkin method, the mode function equations for the drive system with the electric field force can...

... and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors. 12 07 2006 07 01 2007 micromechanical devices damping Q-factor beams (structures) finite element analysis nonlinear dynamical systems nonlinear equations...

...-mechanical systems (MEMS) oscillator. oscillators bifurcation nonlinear dynamical systems micromechanical devices limit cycles Structurally stable features of dynamical systems are those that are expected to persist on open sets in suitable spaces of vector fields. For example, as is well...

... buckling vibrations boundary-value problems micromechanical devices differential equations 10 04 2005 10 12 2005 Our decoupled modal form Duffing equation enables an independent modal analysis in a single mode or a multimode superposition, without modal coupling or intermodal...