Due to the compact layout, manufacturing tolerance, modeling errors, and environmental changes, microelectromechanical systems (MEMSs) are subjected to parasitics and parameter variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic microactuator in the presence of uncertainties. The dynamical model of the system, including parallel and serial parasitics, is firstly established and two control schemes, both based on input-to-state stabilization and robust backstepping, are proposed. The stability and the performance of the system using these control schemes are demonstrated through both stability analysis and numerical simulation.
Issue Section:
Technical Papers
Topics:
Control equipment,
Control systems,
Design,
Errors,
Microelectromechanical systems,
Modeling,
Uncertainty,
Damping,
Trajectories (Physics),
Cascades (Fluid dynamics),
Microactuators,
Robust control,
Stability,
Control modeling,
Capacitance,
Electrostatic actuators,
Dynamics (Mechanics),
Computer simulation,
Manufacturing
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.Copyright © 2007
by American Society of Mechanical Engineers
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