This review provides a summary of work on the resonant nonlinear dynamics of micro- and nanoelectromechanical systems. This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior. While nonlinearities are typically avoided in device design, they have the potential to allow designers to beneficially leverage nonlinear behavior in certain applications. This paper provides an overview of the fundamental research on nonlinear behaviors arising in micro-/nanoresonators, including direct and parametric resonances in individual resonators and coupled resonator arrays, and also describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. This paper closes with some brief remarks about important ongoing developments in the field.
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