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Keywords: capacitance
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. July 2008, 130(4): 041007.
Published Online: June 9, 2008
...-kinematic mechanism featuring single-axis flexure hinges. The stage is driven by piezoelectric actuators, and its displacement is detected by capacitance gauges. The control loop is closed at the end effector instead of at each joint, so as to avoid calibration difficulties and guarantee high positioning...
