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Keywords: desorption
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. December 2009, 131(4): 041001.
Published Online: October 16, 2009
... conductance was also calculated from the pressure tracking data to analyze the leak modes; the molecular flow model and gas desorption model were found to fit the measurement results of leak conductance. The devices that need to work in vacuum environment not only require a specific vacuum level, but also...
Journal Articles