... to measure the leak rate because the measured leak rate was nonlinear with respect to the actual leak size. According to the fact that the damping coefficient changes with the pressure, a tuning fork crystal chip as a pressure sensor was used to monitor the pressure changes in the package cavity. The leak...

...Lung-Tai Chen; Wood-Hi Cheng This study presents a novel technique for an overmolded package of piezoresistive pressure sensors using an ultrathick photoresist sacrificial layer. A 150 μ m photoresist block is placed just on the silicon membrane of the pressure sensor and removed after the molding...

...J. Albert Chiou, Mem. ASME; Steven Chen; Jinbao Jiao The pressure sensor is one of the major applications of microelectromechanical systems (MEMS). An absolute pressure sensor utilizes anodic bonding to create a vacuum cavity between the silicon diaphragm and glass substrate. The manifold absolute...

... June 2003. Associate Editor: Y. C. Lee. 01 May 2001 01 June 2003 15 12 2003 pressure sensors piezoresistive devices finite element analysis Various kinds of pressure sensors have been produced 1 . One of them is the Differential Pressure Feedback (DPFE) Sensor...

... from the conductive carbon prepregs. Procedural techniques are developed and discussed for isolating the pressure sensor’s flow-opening, from the exposure to the prepreg epoxy flow and exposure to the fibrous particles, during the autoclave curing of the composite laminate. The effects of the autoclave...