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Keywords: sputter deposition
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Journal Articles
Journal:
Journal of Electronic Packaging
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. June 2009, 131(2): 021014.
Published Online: April 28, 2009
... structures can open up new avenues for early detection and treatment of human cancer. Fabrication of the nanoscale structures is accomplished through electron-beam evaporation and sputter deposition in combination with electronic beam lithography, using the JEOL JBX-9300FS EBL System at Georgia Tech...
