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Keywords: GaN
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Heat Mass Transfer. October 2021, 143(10): 102201.
Paper No: HT-21-1107
Published Online: September 8, 2021
...Omar Dhannoon Jumaah; Yogesh Jaluria Chemical vapor deposition (CVD) is a widely used manufacturing process for obtaining thin films of materials like silicon, silicon carbide, graphene, and gallium nitride that are employed in the fabrication of electronic and optical devices. Gallium nitride (GaN...
Journal Articles