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Journal Articles

Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration

Accepted Manuscript
Masaki Michihata, Souki Fujimura, Shuzo Masui, Satoru Takahashi
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng.
Paper No: MANU-24-1366
https://doi.org/10.1115/1.4066035
Published Online: July 19, 2024
View Article titled, Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration
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Topics: Diffraction gratings, Displacement measurement, Error compensation, Displacement, Interferometers, Measurement systems, Inspection, Lasers, Metrology, Quality control
Journal Articles

Three-Dimensional Printed Diffraction Gratings Drop Coated by Different Resins and Their Mechanism

Junyu Hua, Yujie Shan, Shaocheng Wu, Huachao Mao
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2024, 146(1): 011001.
Paper No: MANU-23-1289
https://doi.org/10.1115/1.4063137
Published Online: August 29, 2023
View Article titled, Three-Dimensional Printed Diffraction Gratings Drop Coated by Different Resins and Their Mechanism
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Topics: Additive manufacturing, Coating processes, Coatings, Diffraction, Diffraction gratings, Diffraction patterns, Resins, Refractive index, Lasers, Wavelength
Journal Articles

Experimental Investigation and Numerical Analysis of Mechanical Ruling for an Aluminum-Coated Diffraction Grating

Baoqing Zhang, Qinghua Wang, Ninggang Shen, Hongtao Ding
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. February 2017, 139(2): 021003.
Paper No: MANU-16-1153
https://doi.org/10.1115/1.4034282
Published Online: August 24, 2016
View Article titled, Experimental Investigation and Numerical Analysis of Mechanical Ruling for an Aluminum-Coated Diffraction Grating
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Topics: Deformation, Diffraction gratings, Nanoindentation, Simulation, Stress, Aluminum, Modeling, Temperature, Simulation results, Diamond tools
Journal Articles

Scanning Grating Microinterferometer for MEMS Metrology

Byungki Kim, Graduate Research Assistant, Michael C. Schmittdiel, Graduate Research Assistant, F. Levent Degertekin, Assistant Professor, Thomas R. Kurfess, Professor
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
https://doi.org/10.1115/1.1812773
Published Online: February 4, 2005
View Article titled, Scanning Grating Microinterferometer for MEMS Metrology
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Topics: Diffraction gratings, Interferometers, Manufacturing, Metrology, Microelectromechanical systems, Vibration, Resolution (Optics), Sensors
Journal Articles

Development of a Grating Interferometer with Application to HDD Servo-Track Writing

Harry D. Garner, Kok-Meng Lee, Lin Guo
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2001, 123(3): 445–452.
https://doi.org/10.1115/1.1360694
Published Online: April 1, 2000
View Article titled, Development of a Grating Interferometer with Application to HDD Servo-Track Writing
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Topics: Diffraction gratings, Diffraction patterns, Horizontal directional drilling, Interferometers, Displacement, Actuators, Sensors, Design