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Keywords: ARMAX model
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2006, 128(1): 315–325.
Published Online: December 15, 2004
...Jionghua Jin; Huairui Guo; Shiyu Zhou This paper presents a supervisory generalized predictive control (GPC) by combining GPC with statistical process control (SPC) for the control of the thin film deposition process. In the supervised GPC, the deposition process is described as an ARMAX model...
