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Keywords: photonic crystals
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Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030907.
Published Online: May 26, 2010
... 2010 nanofabrication nanolithography nanostructured materials photonic crystals scanning electron microscopy Nanoimprint lithography (NIL) techniques were regarded as parallel nanofabrication methods for high-resolution and high-aspect-ratio features ( 1 2 3 ). NIL has...
