A three degree-of-freedom (3DOF) pseudo-rigid-body model (PRBM) has been developed and used in the design of a new class of self-retracting fully compliant bistable micromechanism (SRFBM). The SRFBM provides small-displacement linear travel bistability and is suitable for low-power microswitching applications. The design process involved a combination of single and multiple degree-of-freedom PRBM and finite element models to quickly proceed from a concept rigid-body mechanism to fully compliant fabrication-ready geometry. The 3DOF model presented here was developed to more accurately model the behavior of the tensural pivots—a new class of compliant segment used to avoid combined compressive loading of flexible segments. Four SRFBM designs were fabricated and tested for bistability, on-chip actuation, critical force, and fatigue tests. These tests validate the models used in the design process and demonstrate the functionality and reliability of the SRFBM.
Issue Section:
Technical Papers
1.
Masters
, N. D.
, and Howell
, L. L.
, 2003
, “A Self-Retracting Fully-Compliant Bistable Micromechanism
,” J. Microelectromech. Syst., Trans. IEEE ASME
, 12
, pp. 273
–280
.2.
Ha¨lg, B., 1990, “On a Nonvolatile Memory Cell Based on Micro-Electro-Mechanics,” Proceedings Micro Electro Mechanical Systems, 1990, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, IEEE, pp. 172–176.
3.
Matoba H., Ishikawa, T., Kim, C.-J., and Muller, R. S., 1994, “A Bistable Snapping Microactuator,” Proc. IEEE Micro Electro-Mechanical Systems, Jan. 1994, Oiso (Japan), pp. 45–50.
4.
Vangbo
, M.
, 1998
, “A Lateral Symmetrically Bistable Buckled Beam
,” J. Micromech. Microeng.
, 8
, pp. 29
–32
.5.
Vangbo
, M.
, 1998
, “An Analytical Analysis of a Compressed Bistable Buckled Beam
,” Sens. Actuators, A
, 69
, pp. 212
–216
.6.
Jensen, B. D., Parkinson, M. B., Kurabayashi, K., Howell, L. L., and Baker, M. S., 2001, “Design Optimization of a Fully-Compliant Bistable Micro-Mechanism,” Microelectromechanical Systems (MEMS), at the 2001 ASME International Mechanical Engineering Congress and Exposition, November, 2001, IMECE2001/MEMS-23852.
7.
Qiu
, J.
, Lang
, J. H.
, and Slocum
, A. H.
, 2004
, “A Curved-Beam Bistable Mechanism
,” J. Microelectromech. Syst.
, 13
, pp. 137
–146
.8.
Taher
, M.
, and Saif
, A.
, 2000
, “On a Tunable Bistable MEMS—Theory and Experiment
,” J. Microelectromech. Syst.
, 9
, pp. 157
–170
.9.
Baker
, M. S.
, and Howell
, L. L.
, 2002
, “On-Chip Actuation of an In-Plane Compliant Bistable Micro-Mechanism
,” J. Microelectromech. Syst.
, 11
, pp. 566
–573
.10.
Kruglick, E. J. J., and Pister, K. S. J., 1998, “Bistable MEMS Relays and Contact Characterization,” IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 8–11, pp. 333–337.
11.
Jensen
, B. D.
, Howell
, L. L.
, and Salmon
, L. G.
, 1999
, “Design of Two-Link In-Plane, Bistable Compliant Micro-Mechanisms
,” J. Mech. Des.
, 121
, pp. 416
–423
.12.
Kruglick
, E. J. J.
, and Pister
, K. S. J.
, 1999
, “Lateral MEMS Microcontact Considerations
,” J. Microelectromech. Syst.
, 8
, pp. 264
–271
.13.
Jensen
, B. D.
, and Howell
, L. L.
, 2003
, “Identification of Compliant Pseudo-Rigid-Body Mechanism Configurations Resulting in Bistable Behavior
,” J. Mech. Des.
, 125
, pp. 701
–708
.14.
Baker, M. S., Lyon, S. M., and Howell, L. L., 2000, “A Linear Displacement Bistable Micromechanism,” Proceedings of the 2000 ASME Design Engineering Technical Conferences, DETC2000/MECH-14117, pp. 1–7.
15.
Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K. W., 2000, MUMPs™ Design Handbook Revision 5.0, Cronos Integrated Microsystems, Research Triangle Park, NC.
16.
Rodgers, S., 1999, “Dynamic MEMS Design,” Sandia MEMS Advanced Design Short Course, Sandia National Laboratories, Albuquerque, NM.
17.
Howell, L. L., 2001, Compliant Mechanisms, Wiley, New York.
18.
Frecker
, M.
, Kikuchi
, N.
, and Kota
, S.
, 1999
, “Topology Optimization of Compliant Mechanisms With Multiple Outputs
,” Struct. Optim.
, 17
, pp. 269
–278
.19.
Saxena
, A.
, and Ananthasuresh
, G. K.
, 2000
, “On an Optimal Property of Compliant Topologies
,” Struct. Multidisc. Opt.
, 19
, pp. 36
–49
.20.
Pedersen
, C. B. W.
, Buhl
, T.
, and Sigmund
, O.
, 2001
, “Topology Synthesis of Large-Displacement Compliant Mechanisms
,” Int. J. Numer. Methods Eng.
, 50
, pp. 2683
–2705
.21.
Tai
, K.
, Cui
, G. Y.
, and Ray
, T.
, 2002
, “Design Synthesis of Path Generating Compliant Mechanisms by Evolutionary Optimization of Topology and Shape
,” J. Mech. Des.
, 124
, pp. 492
–500
.22.
Xu
, D.
, and Ananthasuresh
, G. K.
, 2003
, “Freeform Skeletal Shape Optimization of Compliant Mechanisms
,” J. Mech. Des.
, 125
, pp. 253
–261
.23.
Ananthasuresh, G. K., and Frecker, M., 2001, “Optimal Synthesis With Continuum Models,” Compliant Mechanisms, John Wiley, New York.
24.
Jensen, B. D., and Howell, L. L., 2004, “Bistable Configurations of Compliant Mechanisms Modeled Using Four Links and Translational Joints,” J. Mech. Des., in press.
25.
Howell
, L. L.
, and Midha
, A.
, 1994
, “A Method for the Design of Compliant Mechanisms With Small-Length Flexural Pivots
,” ASME J. Mech. Des.
, 116
, pp. 280
–290
.26.
Guerinot, A. E., Magleby, S. P., Howell, L. L., and Todd, R. H., 2005, “Compliant Joint Design Principles for High Compressive Load Situations,” J. Mech. Design, in press.
27.
Gere, J. M., and Timoshenko, S. P., 1984, Mechanics of Materials, 3rd ed., PWS Kent, Boston.
28.
Juvinall, R. C., 1967, Engineering Considerations of Stress, Strain, and Strength, McGraw-Hill, New York.
29.
Masters, N. D., and Howell, L. L., “A Three Degree of Freedom Pseudo-Rigid-Body Model for the Design of a Fully Compliant Bistable Micromechanism,” Proceedings of the 2002 ASME Mechanisms and Robotics Conference, DETC2002/MECH-34202.
30.
Paul, B., 1979, Kinematics and Dynamics of Planar Machinery, Prentice-Hall, Upper Saddle River, NJ.
31.
Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K. W., 2000, MUMPs Design Handbook, Rev 5.0, Cronos Integrated Microsystems, Research Triangle Park, NC.
32.
Cragun, R., and Howell, L. L., 1999, “Linear Thermomechanical Microactuators,” Microelectromechanical Systems (MEMS), at the 1999 ASME International Mechanical Engineering Congress and Exposition, pp. 181–188.
33.
Howell
, L. L.
, and McLain
, T. W.
, 2002
, “A Little Push
,” Mech. Eng. (Am. Soc. Mech. Eng.)
, 124
, pp. 58
–59
.34.
Lott
, C. D.
, McLain
, T. W.
, Harb
, J. N.
, and Howell
, L. L.
, 2002
, “Modeling the Thermal Behavior of a Surface-Micromachined Linear-Displacement Thermomechanical Microactuator
,” Sens. Actuators, A
, 101
, pp. 239
–250
.35.
Wittwer
, J. W.
, Gomm
, T.
, and Howell
, L. L.
, 2002
, “Surface Micromachined Force Gauges: Uncertainty and Reliability
,” J. Micromech. Microeng.
, 12
, pp. 13
–20
.Copyright © 2005
by ASME
You do not currently have access to this content.
