We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 s and resolution down to single mirror pitch size of 10.8 m is also achievable.
Issue Section:
Research Papers
References
1.
Etch
, T.
, 2010
, “Photoetched Fuel Cell Plates, Frames, Support Screens & End Caps
,” http://www.tech-etch.com/photoetch/fuelcell.html2.
IPHE, 2010, “The Role of Battery Electric Vehicles, Plug-in Hybrids and Fuel Cell Electric Vehicles
,” http://www.iphe.net/docs/Resources/Power_trains_for_Europe.pdf3.
Wilkening
, G.
, and Bosse
, H.
, 2005
, “Nano- and Micrometrology State-of-the-Art and Future Challenges
,” MAPAN-J. Metrol. Soc. India
, 20
(2
), pp. 125
–151
.4.
Hansen
, H. N.
, Tosello
, G.
, Gasparin
, S.
, and De Chiffre
, L.
, 2011
, “Dimensional Metrology for Process and Part Quality Control in Micro Manufacturing
,” Int. J. Precis. Technol.
, 2
(2–3
), pp. 118
–135
.10.1504/IJPTECH.2011.0394555.
Danzebrink
, H. U.
, Koenders
, L.
, Wilkening
, G.
, Yacoot
, A.
, and Kunzmann
, H.
, 2006
, “Advances in Scanning Force Microscopy for Dimensional Metrology
,” Cirp Ann.-Manuf. Technol.
, 55
(2
), pp. 841
–878
.10.1016/j.cirp.2006.10.0106.
Wyant
, J. C.
, 1974
, “White-Light Extended Source Shearing Interferometer
,” Appl. Opt.
, 13
(1
), pp. 200
–202
.10.1364/AO.13.0002007.
Minsky
, M.
, 1988
, “Memoir on Inventing the Confocal Scanning Microscope
,” Scanning
, 10
(4
), pp. 128
–138
.10.1002/sca.49501004038.
Marshall
, G. F.
, and Stutz
, G. E.
, 2004
, Handbook of Optical and Laser Scanning
, Taylor & Francis
, Boca Raton, FL.9.
Fujii
, T.
, and Fukuchi
, T.
, 2005
, Laser Remote Sensing
, Taylor & Francis
, Boca Raton, FL.10.
Dotson
, C.
, Harlow
, R.
, and Thompson
, R. L.
, 2003
, Fundamentals of Dimensional Metrology
, Thomson Learning
, Albany, NY.11.
Weitkamp
, C.
, 2005
, Lidar: Range-Resolved Optical Remote Sensing of the Atmosphere
, Springer
, Berlin, Germany.12.
Schwarz
, B.
, 2010
, “LIDAR: Mapping the World in 3D
,” Nat. Photonics
, 4
(7
), pp. 429
–430
.10.1038/nphoton.2010.14813.
Sinha
, A.
, 2010
, Vibration of Mechanical Systems
, Cambridge University Press
, New York.14.
Osten
, W.
, 2006
, Optical Inspection of Microsystems
, Taylor & Francis
, Boca Raton, FL.15.
Pelesko
, J. A.
, and Bernstein
, D. H.
, 2002
, Modeling MEMS and NEMS
, Taylor & Francis
, Boca Raton, FL.16.
Popescu
, G.
, Ikeda
, T.
, Goda
, K.
, Best-Popescu
, C. A.
, Laposata
, M.
, Manley
, S.
, Dasari
, R. R.
, Badizadegan
, K.
, and Feld
, M. S.
, 2006
, “Optical Measurement of Cell Membrane Tension
,” Phys. Rev. Lett.
, 97
(21
), p. 218101
.10.1103/PhysRevLett.97.21810117.
Goebel
, W.
, Kampa
, B. M.
, and Helmchen
, F.
, 2007
, “Imaging Cellular Network Dynamics in Three Dimensions Using Fast 3D Laser Scanning
,” Nat. Methods
, 4
(1
), pp. 73
–79
.10.1038/nmeth98918.
Pawley
, J. B.
, 1995
, Handbook of Biological Confocal Microscopy
, Plenum Press
, New York.19.
Denk
, W.
, Strickler
, J. H.
, and Webb
, W. W.
, 1990
, “2-Photon Laser Scanning Fluorescence Microscopy
,” Science
, 248
(4951
), pp. 73
–76
.10.1126/science.232102720.
Hoffman
, A.
, Goetz
, M.
, Vieth
, M.
, Galle
, P. R.
, Neurath
, M. R.
, and Kiesslich
, R.
, 2006
, “Confocal Laser Endomicroscopy: Technical Status And Current Indications
,” Endoscopy
, 38
(12
), pp. 1275
–1283
.10.1055/s-2006-94481321.
Tarnok
, A.
, and Gerstner
, A. O. H.
, 2002
, “Clinical Applications of Laser Scanning Cytometry
,” Cytometry
, 50
(3
), pp. 133
–143
.10.1002/cyto.1009922.
23.
Yaqoob
, Z.
, and Riza
, N. A.
, 2004
, “Passive Optics No-Moving-Parts Barcode Scanners
,” IEEE Photonics Technol. Lett.
, 16
(3
), pp. 954
–956
.10.1109/LPT.2004.82374924.
Goutzoulis
, A. P.
, Pape
, D. R.
, and Kulakov
, S. V.
, 1994
, Design and Fabrication of Acousto-Optic Devices
, M. Dekker
, New York
.25.
Goda
, K.
, Mahjoubfar
, A.
, Wang
, C.
, Fard
, A.
, Adam
, J.
, Gossett
, D. R.
, Ayazi
, A.
, Sollier
, E.
, Malik
, O.
, Chen
, E.
, Liu
, Y.
, Brown
, R.
, Sarkhosh
, N.
, Di Carlo
, D.
, Jalali
, B.
, 2012
, “Hybrid Dispersion Laser Scanner
,” Sci. Rep.
, 2
.10.1038/srep0044526.
Jung
, I. W.
, Wang
, J. S.
, and Solgaard
, O.
, 2007
, “Optical Pattern Generation Using a Spatial Light Modulator for Maskless Lithography
,” IEEE J. Sel. Top. Quantum Electron.
, 13
(2
), pp. 147
–154
.10.1109/JSTQE.2007.89309527.
Dudley
, D.
, Duncan
, W. M.
, and Slaughter
, J.
, 2003
, “Emerging Digital Micromirror Device (DMD) Applications
,” Proc. SPIE
, 4985
, pp. 14
–25
.10.1117/12.48076128.
Nayar
, S. K.
, Branzoi
, V.
, and Boult
, T. E.
, 2004
, “Programmable Imaging Using a Digital Micromirror Array
,” Proceedings of the 2004
IEEE
Computer Society Conference on Computer Vision and Pattern Recognition, Vol. 1
, pp. I-436
–I-443
.10.1109/CVPR.2004.131506529.
30.
Nesbitt
, R. S.
, Smith
, S. L.
, Molnar
, R. A.
, Benton
, S. A.
, 1999
, “Holographic Recording Using a Digital Micromirror Device
,” Proc. SPIE
, 3637
, pp. 12
–20
.10.1117/12.34376731.
Boyraz
, O.
, Kim
, J.
, Islam
, M. N.
, and Jalali
, B.
, 2000
, “10 Gb/s Multiple Wavelength, Coherent Short Pulse Source Based on Spectral Carving of Supercontinuum Generated in Fibers
,” J. Lightwave Technol.
, 18
(12
), pp. 2167
–2175
.10.1109/50.90882932.
Kalyoncu
, S. K.
, Huang
, Y.
, Song
, Q.
, and Boyraz
, O.
, 2012
, “Analytical Study on Arbitrary Waveform Generation by MEMS Micro Mirror Arrays
,” Opt. Express
, 20
(25
), pp. 27542
–27553
.10.1364/OE.20.02754233.
Kalyoncu
, S. K.
, Huang
, Y.
, Song
, Q.
, and Boyraz
, O.
, 2013
, “Fast Arbitrary Waveform Generation by Using Digital Micromirror Arrays
,” IEEE Photonics J.
, 5
(1
), pp. 302
–303
.10.1109/JPHOT.2013.223866434.
Kalyoncu
, S. K.
, Huang
, Y.
, Torun
, R.
, Zhao
, Q.
, and Boyraz
, O.
, 2013
, “ Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays
,” CLEO Conference 2013
, San Jose, CA.35.
DLP Texas Instruments,
2010
, “Digital Exposure
,” http://www.ti.com/analog/docs/memsmidlevel.tsp?sectionId=622&tabId=245536.
GNT, “
Presentation of the DLP Technology
,” http://us.generation-nt.com/technology-dlp-video-projector-digital-light-processing-review-42606-2.htmlCopyright © 2014 by ASME
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