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Journal Articles

Slot-Die Coating Operability Window for Nanoparticle Bed Deposition in a Microscale Selective Laser Sintering Tool

Dipankar Behera, Daniel Liao, Michael A. Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2020, 8(4): 041012.
Paper No: JMNM-20-1046
https://doi.org/10.1115/1.4049668
Published Online: February 1, 2021
View Article titled, Slot-Die Coating Operability Window for Nanoparticle Bed Deposition in a Microscale Selective Laser Sintering Tool
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Topics: Coating processes, Coatings, Film thickness, Sintering, Lasers, Computational fluid dynamics
Includes: Supplementary data
Journal Articles

Noncontact Planar Stage Based on Near-Field Acoustic Transportation

Yang Yang, Keyu Chen, Ping Guo
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2020, 8(2): 021002.
Paper No: JMNM-19-1046
https://doi.org/10.1115/1.4046693
Published Online: April 1, 2020
View Article titled, Noncontact Planar Stage Based on Near-Field Acoustic Transportation
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Topics: Acoustics, Capacitance, Design, Levitation, Transportation systems, Vibration, Film thickness, Engineering prototypes, Feedback, Trajectories (Physics)
Journal Articles

A Foam-Core Meniscus Coating Process for Retrofit Anti-Reflective Coatings

Venkata Rajesh Saranam, Chih-Hung Chang, Brian K. Paul
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2019, 7(3): 031003.
Paper No: JMNM-19-1006
https://doi.org/10.1115/1.4043988
Published Online: July 25, 2019
View Article titled, A Foam-Core Meniscus Coating Process for Retrofit Anti-Reflective Coatings
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Topics: Coating processes, Coatings, Film thickness, Glass, Sol-gel processing, Fluids, Evaporation, Fluid dynamics
Journal Articles

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Martin Ward, Michael Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011003.
Paper No: JMNM-18-1067
https://doi.org/10.1115/1.4043420
Published Online: May 15, 2019
View Article titled, Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films
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Topics: Design, Engineering prototypes, Fracture (Materials), Semiconductor wafers, Silicon, Stress, Surface roughness, Tension, Thin films, Wedges
Journal Articles

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Shrawan Singhal, Michelle A. Grigas, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2016, 4(3): 031004.
Paper No: JMNM-16-1008
https://doi.org/10.1115/1.4033742
Published Online: July 1, 2016
View Article titled, Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes
Open the PDF for Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes in another window
Topics: Particulate matter, Contamination, Nanofabrication, Film thickness, Deformation, Nanoscale phenomena, Nanomanufacturing
Journal Articles

A Computational Model to Study Film Formation and Debris Flushing Phenomena in Spray-Electric Discharge Machining

Arvind Pattabhiraman, Deepak Marla, Shiv G. Kapoor
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2016, 4(3): 031002.
Paper No: JMNM-15-1076
https://doi.org/10.1115/1.4033709
Published Online: June 30, 2016
View Article titled, A Computational Model to Study Film Formation and Debris Flushing Phenomena in Spray-Electric Discharge Machining
Open the PDF for A Computational Model to Study Film Formation and Debris Flushing Phenomena in Spray-Electric Discharge Machining in another window
Topics: Drops, Electrical discharge machining, Pressure, Sprays, Machining, Thin films, Particulate matter, Nozzles, Film thickness