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Keywords: Metrology
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010901.
Paper No: JMNM-20-1012
Published Online: February 9, 2021
...Robert M. Panas; Jefferson A. Cuadra; K. Aditya Mohan; Rosa E. Morales Micro- and nanomanufacturing capabilities have rapidly expanded over the past decade to include complex three-dimensional (3D) structure fabrication; however, the metrology required to accurately assess these processes via part...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031005.
Paper No: JMNM-16-1073
Published Online: June 7, 2017
... and 2D grating structures. The 1D grating consisted of lines with a pitch of 4  μ m and a height of (525 ± 15) nm measured using a metrology AFM, where ± denotes the expanded uncertainty. The 2D gratings consist of holes in a quadratic array with equal pitches of 2 μ m. The width of the holes is 300 nm...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2017, 5(2): 021002.
Paper No: JMNM-16-1043
Published Online: March 2, 2017
... Engineering Division of ASME for publication in the J OURNAL OF M ICRO- AND N ANO -M ANUFACTURING . Manuscript received September 16, 2016; final manuscript received December 13, 2016; published online March 2, 2017. Assoc. Editor: Don A. Lucca. 16 09 2016 13 12 2016 Metrology Micro...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2016, 4(3): 031004.
Paper No: JMNM-16-1008
Published Online: July 1, 2016
... OF M ICRO- AND N ANO -M ANUFACTURING . Manuscript received March 13, 2016; final manuscript received May 24, 2016; published online July 1, 2016. Assoc. Editor: Nicholas Fang. 13 03 2016 24 05 2016 Metrology Modeling Nanomanufacturing Process control High-volume...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2014, 2(2): 021004.
Paper No: JMNM-13-1055
Published Online: April 8, 2014
.... Metrol. Soc. India , 20 ( 2 ), pp. 125 – 151 . [4] Hansen , H. N. , Tosello , G. , Gasparin , S. , and De Chiffre , L. , 2011 , “ Dimensional Metrology for Process and Part Quality Control in Micro Manufacturing ,” Int. J. Precis. Technol. , 2 ( 2–3 ), pp. 118 – 135 . 10.1504...