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Satoru Takahashi
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Journal Articles

Special Issue: The State-of-the-Art in Japanese Manufacturing Research

Yasuhiro Kakinuma, Atsushi Matsubara, Takashi Matsumura, Naohiko Sugita, Norikazu Suzuki, Satoru Takahashi, Jiwang Yan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Guest Editorial
J. Manuf. Sci. Eng. January 2025, 147(1): 010301.
Paper No: MANU-24-1750
https://doi.org/10.1115/1.4067225
Published Online: December 17, 2024
View Article titled, Special Issue: The State-of-the-Art in Japanese Manufacturing Research
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Topics: Manufacturing
Journal Articles

Concept of Error Compensation for Nonorthogonality in Two-Axis Displacement Measurement System Utilizing Single Grating Scale and Littrow Configuration

Masaki Michihata, Souki Fujimura, Shuzo Masui, Satoru Takahashi
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2025, 147(1): 011004.
Paper No: MANU-24-1366
https://doi.org/10.1115/1.4066035
Published Online: October 4, 2024
View Article titled, Concept of Error Compensation for Nonorthogonality in Two-Axis Displacement Measurement System Utilizing Single Grating Scale and Littrow Configuration
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Topics: Diffraction gratings, Displacement measurement, Displacement
Proceedings Papers

Automatic Defects Measurement on Silicon Wafer Surface by Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya
Proc. ASME. IMECE2000, Manufacturing Engineering, 209-214, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1809
https://doi.org/10.1115/IMECE2000-1809
View Paper titled, Automatic Defects Measurement on Silicon Wafer Surface by Laser Scattered Defect Pattern
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Topics: Lasers, Semiconductor wafers, Fourier transforms, Lenses (Optics), Optical measurement, Particulate matter
Journal Articles

The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

Yizhao Guan, Hiromasa Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. March 2022, 144(3): 031004.
Paper No: MANU-21-1318
https://doi.org/10.1115/1.4051827
Published Online: August 6, 2021
View Article titled, The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy
Open the PDF for The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy in another window
Topics: Finite difference time-domain analysis, Microscopy, Standing waves, Wavelength
Proceedings Papers

The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

Yizhao Guan, Hiromasa Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
Proc. ASME. MSEC2021, Volume 1: Additive Manufacturing; Advanced Materials Manufacturing; Biomanufacturing; Life Cycle Engineering; Manufacturing Equipment and Automation, V001T05A003, June 21–25, 2021
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2021-60409
https://doi.org/10.1115/MSEC2021-60409
View Paper titled, The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy
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Topics: Finite difference time-domain analysis, Microscopy, Standing waves
Proceedings Papers

Numerical Study on Tip Shape of Near-Field Optical Fiber Probe for Detecting Electric Field Intensity of Whispering Gallery Mode Resonance

Yushen Liu, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
Proc. ASME. MSEC2021, Volume 1: Additive Manufacturing; Advanced Materials Manufacturing; Biomanufacturing; Life Cycle Engineering; Manufacturing Equipment and Automation, V001T05A004, June 21–25, 2021
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2021-60417
https://doi.org/10.1115/MSEC2021-60417
View Paper titled, Numerical Study on Tip Shape of Near-Field Optical Fiber Probe for Detecting Electric Field Intensity of Whispering Gallery Mode Resonance
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Topics: Electric fields, Optical fiber, Probes, Resonance, Shapes, Wavelength
Proceedings Papers

Measuring Optical Properties of Advanced Nano/Micro-Periodic Structures Fabricated by Multi-Exposure Interference Lithography

Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T07A007, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8571
https://doi.org/10.1115/LEMP2020-8571
View Paper titled, Measuring Optical Properties of Advanced Nano/Micro-Periodic Structures Fabricated by Multi-Exposure Interference Lithography
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Topics: Diffraction gratings, Lithography