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Keywords: chemical vapor deposition
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. June 2023, 15(6): 061005.
Paper No: TSEA-22-1509
Published Online: April 3, 2023
... on the quality of the GaN thin films. The metal-organic chemical vapor deposition (MOCVD) process is a common manufacturing technique for fabricating high-quality thin films. By manipulating the operating conditions and the reactor design, one can control the deposition rate and the uniformity of the thin film...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. February 2020, 12(1): 011010.
Paper No: TSEA-18-1496
Published Online: September 7, 2019
...C. Teixeira; A. F. Silva; L. A. Rocha Over the last years, there has been a high interest in carbon nanotubes' (CNTs) applications due to their unique properties, mainly at mechanical and electrical levels. However, current synthesis processes, such as chemical vapor deposition (CVD), are highly...