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Keywords: thin film deposition
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. June 2023, 15(6): 061005.
Paper No: TSEA-22-1509
Published Online: April 3, 2023
... 16 02 2023 21 02 2023 03 04 2023 heat and mass transfer heat transfer in manufacturing micro/nanoscale heat transfer thin film deposition chemical vapor deposition thermal systems Wide bandgap semiconductor materials have attracted intense attention for microelectronic...
