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Keywords: integrating circuits
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. October 2000, 122(4): 796–802.
Published Online: May 8, 2000
... lubrication dust large scale integration integrating circuits rolling friction sliding friction materials testing machine bearings Clean tribology is a key technology in the LSI (large-scale integrated circuits) manufacturing process, micromachine and magnetic recording head-media interface 1...
